Modular photoacoustic detection device

ABSTRACT

Modular photoacoustic detection device comprising:
         a photoacoustic cell including at least two chambers connected by at least two capillaries and forming a Helmholtz type differential acoustic resonator;   acoustic detectors coupled to the chambers;   a light source capable of emitting a light beam having at least one wavelength capable of exciting a gas intended to be detected and which can be modulated to a resonance frequency of the photoacoustic cell;   a first photonic circuit optically coupling the light source to an input face of a first of the chambers;   wherein the first photonic circuit is arranged in a detachable manner in a first housing formed in the acoustic cell and emerging on the input face of the first chamber.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.15/174,322, filed Jun. 6, 2016, which is based on and claims priority toFrench Application No. 15 55200, filed Jun. 8, 2015. Theabove-identified documents are incorporated herein by reference in theirentireties.

TECHNICAL FIELD AND PRIOR ART

The invention relates to the field of miniaturized photoacousticdetection devices, and notably that of miniaturized gas sensors makinguse of a photoacoustic effect for measuring the concentration of somegaseous elements.

The principle of a measurement of a gas by photoacoustic effect is basedon the excitation of an acoustic wave in the gas by a light source suchas a pulsed or amplitude or wavelength modulated laser. The wavelengthof the radiation, for example in the mid-infrared (MIR), thenear-infrared (NIR), or the visible or UV domain, emitted by the laseris chosen to interact specifically with the molecules of the gas todetect. The emission of the light source being modulated, the energyabsorbed by the gaseous molecules is restored in the form of atransitory heating which generates a pressure wave, itself measured byan acoustic detector such as a microphone. Although the photoacousticeffect has been known for a long time, its use for gas measurement hasbeen made possible by the implementation of monochromatic light sourcessuch as lasers, and sensitive microphones such as electret capacitivemicrophones.

Detection is improved by confining the gas in a cavity and by modulatingthe laser to an acoustic resonance frequency of the cavity. Theamplitude of the acoustic wave obtained is directly linked to theconcentration of the gaseous compound searched for in the gas present inthe excited cavity.

Detection efficiency is based to a large extent on the efficientcoupling of the luminous flux of the laser with the gas contained in theresonating cavity because the measured signal is proportional to theenergy absorbed, then dissipated, by the gas.

The document WO 03/083455 A1 describes a photoacoustic measurementdevice making it possible to detect the presence of a gas and comprisinga particular structure of photoacoustic cell called “DifferentialHelmholtz Resonator” (DHR), or Helmholtz type differential acousticresonator. Such a photoacoustic cell comprises two identical chambersconnected together by two capillaries. Acoustic resonance is produced byexciting only one of the two chambers. At resonance, the pressures inthe two chambers oscillate in phase opposition. The pressures in thechambers are measured by microphones placed on the walls of the twochambers. With such a resonator, the calculation of the differencebetween the signals coming from each chamber, which corresponds to theuseful signal, makes it possible to increase the amplitude of themeasured signal and to eliminate a part of the surrounding noise, andthus to have in the end a good signal to noise ratio.

Such a device nevertheless has the drawbacks of being limited to anon-miniaturized laboratory apparatus, of having limited transmissionwavelengths, of being sensitive to temperature variations and tovibrations, and of having significant constraints of positioning andalignment of its elements for its production.

The document EP 2 515 096 A1 describes a photoacoustic gas detectiondevice comprising a DHR type miniaturized photoacoustic resonatorintegrated on silicon. The structure of this detector is obtained by theimplementation of techniques from the microelectronics field in severalsubstrates bonded together. The manufacturing process imposes placingthe MIR waveguide, which makes it possible to inject the optical lasersignal into one of the two chambers, in the lower part of the centralsubstrate which is thinned to a thickness determined by the height ofthe chambers. The whole of the device is produced in the form of asingle nano-photonic circuit integrating all the elements of the device.

Thus, this device is miniaturized, which has numerous advantages. Infact, this miniaturization makes it possible to have a stronger pressuresignal produced by the sensor due to the fact that this signal increaseswhen the size of the resonator is reduced. DHR resonators areparticularly well suited to miniaturization and to integration onsilicon because they are relatively insensitive to the location of thethermal energy deposition and because, the pressure being practicallyconstant in each chamber, it is possible to multiply the number ofmicrophones per chamber to improve the signal to noise ratio.

On the other hand, the monolithic structure of this device poses severaldrawbacks.

In fact, after one or more gas detections, the chambers of thephotoacoustic cell may be contaminated by the gas or gases detected. Itis also possible that the microphones no longer work after several gasdetections. Yet, with such a monolithic structure, it is then necessaryto replace the whole detection device to carry out new gas detections.

In addition, in order to be able to carry out the detection of differentgases, the device necessarily makes use of several different lasersources, which represents a significant cost for the production of thedetection device. This is all the more problematic when thecontamination of the chambers of the photoacoustic cell imposes thereplacement of these different laser sources.

DESCRIPTION OF THE INVENTION

An aim is thus to propose a photoacoustic detection device not posingthe problems linked to monolithic detection devices of the prior art,that is to say not requiring a replacement of the whole of the detectiondevice when the chambers of the photoacoustic cell are contaminated bygases, and which can serve in the detection of different gases withouthaving to integrate necessarily different light sources in the device.

For this, a modular photoacoustic detection device is proposedcomprising at least:

-   -   a photoacoustic cell including at least two chambers connected        by at least two capillaries and forming a Helmholtz type        differential acoustic resonator;    -   acoustic detectors coupled to the chambers;    -   a light source capable of emitting a light beam having at least        one wavelength capable of exciting a gas intended to be detected        and which can be modulated to a resonance frequency of the        photoacoustic cell;    -   a first photonic circuit optically coupling the light source to        an input face of a first of the chambers;

wherein the first photonic circuit is arranged in a detachable manner ina first housing formed in the acoustic cell and emerging on the inputface of the first chamber.

Thanks to the detachable character of the first photonic circuit, thisphotoacoustic detection device is modular. Thus, the light source, thefirst photonic circuit and the photoacoustic cell form elements that canbe dismantled from each other and are thus replaceable independently ofeach other when one of said elements is faulty. For example, if thechambers of the photoacoustic cell are contaminated following a gasdetection, only the photoacoustic cell may be replaced and the newphotoacoustic cell may be coupled to the other elements of the devicewhich are kept (photonic circuit, light source, etc.). If the lightsource becomes faulty, it is possible to replace it without having toreplace the photoacoustic cell and the first photonic circuit.Similarly, when the acoustic detectors no longer work, it is possible toreplace them without having to change the light source and the firstphotonic circuit.

The modular character of the detection device is also advantageousbecause it is possible to change easily the light source in order todetect different gases while using the same photoacoustic cell. Thisavoids having to integrate several different sources in the detectiondevice.

These advantages enable a reduction in the operating costs of thephotoacoustic detection device. It is thus possible to mass producethese devices able to serve in the monitoring of gases of atmosphericinterest, for example in the prediction of gas leakages in a short timein industry or for the detection of toxic gas for example in airplanes.

The photoacoustic detection device may be qualified as “miniaturized”,that is to say having lateral dimensions less than around 10 cm.

A photonic circuit does not correspond to an optic fiber. In fact, aphotonic circuit is a circuit produced on a substrate of material, forexample made of semiconductor, which is not the case of an optic fiber.Moreover, a photonic circuit has a planar structure, unlike an opticfiber which has a cylindrical structure.

In addition, a photonic circuit may comprise different functionalities.Thus, a photonic circuit may form a circuit multiplexer (with severalinputs and one output) and/or demultiplexer. A photonic circuit may alsoform a collimator and/or fulfil a funnel (or “bundle”) functionincluding several inputs and several outputs, which makes it possible tolimit the bulk compared to the use of several optic fibers if severalwavelengths are emitted by the light source.

In addition, a photonic circuit is well suited for transmittingwavelengths between around 3 and 12 μm, or even between around 3 and 14μm, which is well suited to carrying out a gas detection. The range ofwavelengths which can be transmitted by an optic fiber is more limitedthan those which can be transmitted by a photonic circuit. For example,optic fibers based on ZrF₄ can transmit wavelengths ranging from thevisible domain up to around 4.5 μm, and those based on InF₃ can transmitwavelengths ranging from the visible domain up to around 6 μm. Opticfibers based on chalcogenide can transmit wavelengths between 1 and 8 μmbut they are expensive, fragile and the connections of these fibers areabsent or at the best complex to produce.

Optic fibers also pose a problem of bulk compared to a photonic circuit,on account notably of their considerable radius of curvature makingtheir integration difficult. In addition, the sheath of an optic fiberhas a minimum size of 125 μm, or even 250 μm, which makes them difficultto bond directly on an input window of a chamber of a photoacousticcell.

Finally, optic fibers require a greater alignment precision than thatrequired for a photonic circuit.

The acoustic detectors may be coupled in a detachable manner to thephotoacoustic cell. Thus, the acoustic detectors may be replaced or keptindependently of the photoacoustic cell, thereby increasing the modularcharacter of the device.

The photoacoustic cell may be formed by a stack of several layers ofmaterials. The elements of the cell may be etched in the layers ofmaterials.

According to a first example of embodiment, the photoacoustic cell maycomprise at least one stack of a first and of a second layer of materialin which may be formed the chambers, the capillaries, the first housing,at least two openings each being able to emerge in one of thecapillaries and at least two locations each being able to communicatewith one of the chambers and in which the acoustic detectors may bearranged. Such a configuration is particularly suited when the elementsof the photoacoustic cell are produced by chemical etching in a part ofthe thickness of the layers of material.

According to a second example of embodiment, the photoacoustic cell maycomprise at least one stack of a first, second, third and fourth layersof material in which may be formed the chambers, the capillaries, thefirst housing, at least two openings each being able to emerge in one ofthe capillaries and at least two locations each being able tocommunicate with one of the chambers and in which the acoustic detectorsmay be arranged. The fact that the different elements of thephotoacoustic cell are produced in the entire thickness of at least oneof the layers of the stack makes it possible to obtain patterns havingedges clearly perpendicular to each other.

According to a third example of embodiment, the photoacoustic cell maybe formed of a monolithic part of sintered powders. Such a cell may beproduced by 3D printing.

According to a first example of coupling between the light source andthe first photonic circuit, the light source may be optically coupled toan input face of the first photonic circuit by at least one collimationsystem being able to comprise at least one lens, and the first photoniccircuit may form at least one waveguide. This first example of couplingis suited notably when the light source emits a light beam having asingle wavelength.

According to a second example of coupling between the light source andthe first photonic circuit, the light source may be capable of emittinga light beam having several wavelengths and may be arranged against thefirst photonic circuit which forms an arrayed waveguide gratingmultiplexer-demultiplexer circuit.

According to a third example of coupling between the light source andthe first photonic circuit, the light source may be optically coupled toan input face of the first photonic circuit by at least one optic fiber,and the first photonic circuit may form at least one waveguide or anarrayed waveguide grating multiplexer-demultiplexer circuit.

The device may further comprise at least one first cooling systemcapable of thermally adjusting the light source and, when the lightsource is not arranged against the first photonic circuit, a secondcooling system capable of thermally adjusting the photoacoustic cellindependently of the light source. The use of two separate coolingsystems makes it possible to manage independently the operatingtemperatures of the light source (temperature for example between around19° C. and 26° C.) and of the photoacoustic cell (temperature forexample between around 15° C. and 20° C.).

The photoacoustic cell may further comprise at least one second housingemerging on an output face of the first chamber, and the device mayfurther comprise at least one second photonic circuit being able tocouple optically the output face of the first chamber to an opticaldetector and arranged in a detachable manner in the second housing. Inthis configuration, the second photonic circuit thus also forms a partbeing able to be assembled and/or changed independently of the otherelements of the detection device.

The photoacoustic cell may be formed of one or more metals. The use ofone or more metals to form the photoacoustic cell enables the walls ofthe chambers to reflect the light beam, without addition of additionalreflection means around the chambers.

The distance between the two capillaries may be equal to around half ofthe length of at least one of the chambers. This configuration makes itpossible to have better pressure homogeneity in the chambers of thephotoacoustic cell.

A gas detection device is also proposed, comprising at least one deviceas described above and gas input and output channels communicating withthe chambers of the photoacoustic detection device, and wherein said atleast one wavelength of the light beam capable of being emitted by thelight source corresponds to at least one absorption wavelength of atleast one gas intended to be detected.

A method for producing a modular photoacoustic detection device is alsoproposed, comprising at least the steps of:

-   -   producing at least one photoacoustic cell including at least two        chambers connected by at least two capillaries and forming a        Helmholtz type differential acoustic resonator;    -   coupling of acoustic detectors to the chambers;    -   producing at least one light source capable of emitting a light        beam having at least one wavelength capable of making the        photoacoustic cell resonate;    -   producing at least one first photonic circuit arranged in a        detachable manner in a first housing formed in the acoustic cell        and emerging on an input face of a first of the chambers, and        optically coupling the light source to the input face of the        first chamber.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be better understood on reading thedescription of examples of embodiment given for purely indicativepurposes and which is in no way limiting while referring to the appendeddrawings in which:

FIG. 1 schematically shows a modular photoacoustic detection deviceaccording to a particular embodiment;

FIGS. 2A to 5 show the steps of producing the photoacoustic cell of amodular photoacoustic detection device according to a first example ofembodiment;

FIG. 6 shows the resonance frequency and the pressure homogeneity in thephotoacoustic cell of a modular photoacoustic detection device as afunction of the spacing between the capillaries of the photoacousticcell;

FIG. 7 shows the amplitude of the acoustic signal in the photoacousticcell of a modular photoacoustic detection device as a function of thewidth of the capillaries of the photoacoustic cell;

FIGS. 8A to 8C show different coupling configurations between the lightsource and the first photonic circuit of the modular photoacousticdetection device;

FIGS. 9 to 12 each show a layer of material of a stack forming thephotoacoustic cell of a modular photoacoustic detection device accordingto a second example of embodiment;

FIG. 13 shows a photoacoustic cell of a modular photoacoustic detectiondevice according to a third example of embodiment.

Identical, similar or equivalent parts of the different figuresdescribed hereafter bear the same numerical references so as to make iteasier to go from one figure to the next.

The different parts shown in the figures are not necessarily accordingto a uniform scale, in order to make the figures more legible.

The different possibilities (variants and embodiments) should beunderstood as not being mutually exclusive and may be combined together.

DETAILED DESCRIPTION OF PARTICULAR EMBODIMENTS

Reference is firstly made to FIG. 1 which schematically shows a modularphotoacoustic detection device 100 according to a particular embodiment.This device 100 corresponds here to a gas detection device.

The device 100 comprises a light source 102 here corresponding to alaser. This laser may correspond to a QCL (quantum cascade laser) or ICL(interband cascade laser) type laser emitting at least one wavelength inthe MIR domain, for example at a wavelength between around 2 μm and 10μm. Although not shown, the device 100 also comprises an electricalsupply of the light source 102 as well as means of modulating the lightbeam emitted at an acoustic resonance frequency of the cavity in whichthe light beam is intended to be sent. Compared to the use of a lightsource which would not be collimated, the use of a light source 102collimated in the device 100, by virtue of the reduction of the windownoise, makes it possible to considerably increase the signal/noisefactor, for example by a factor of 2. The window noise corresponds tothe parasitic acoustic signal that all the solid parts emit when theyare struck by the modulated light wave.

In a variant, the light source 102 may comprise several lasers, andcorrespond for example to a QCL or ICL laser bar, emitting a light beamformed of several different wavelengths.

The light beam emitted is then transmitted in a first photonic circuit104 which makes it possible to transmit the light beam in aphotoacoustic cell 106 of the device 100. The first photonic circuit 104comprises an input face 105 optically coupled to the light source 102.The optical coupling between the light source 102 and the first photoniccircuit 104 may be produced directly, for example by arranging the lightsource 102 against the first photonic circuit 104, or via the use ofother means which will be described hereafter. The first photoniccircuit 104 also comprises an output face 107. The first photoniccircuit 104 is inserted in a first housing 108 formed in the cell 106.In FIG. 1, a part of the first photonic circuit 104 comprising theoutput face 107 is inserted in this first housing 108, and another partof the first photonic circuit 104 is located outside of the firsthousing 108.

The photoacoustic cell 106 of the device 100 comprises elementscorresponding to cavities, or hollowings out, which are:

-   -   a first chamber 110 in which the gas to detect is intended to be        excited by the light beam emitted by the source 102, and of        which an input face 109 intended to receive the light beam is        optically coupled to the output face 107 of the photonic circuit        104 (due to the fact that the faces 107 and 109 are parallel        with each other and are arranged against each other when the        first photonic circuit 104 is inserted in the first housing        108);    -   a second chamber 112;    -   two capillaries 114 and 116 making it possible to make the        volumes of the chambers 110 and 112 communicate together.

The light source 102 is aligned with the first photonic circuit 104 inorder to inject the light into the first chamber 110, without aprocedure of alignment of the light source 102 vis-à-vis the firstchamber 110 being necessary due to the fact that the insertion of thefirst photonic circuit 104 in the first housing 108 automaticallycarries out this alignment.

The capillaries 114, 116 are advantageously connected to the chambers110, 112 at the level of their lateral faces (faces parallel to theplane (X,Z) shown in FIG. 1). Thus, the capillaries 114, 116 and thechambers 110, 112 may be formed in a same layer, or wafer, of material,which enables their production with a reduced number of manufacturingsteps. In a variant, the capillaries 114, 116 may be connected to thechambers 110, 112 at the level of their upper or lower face (facesparallel to the plane (X,Y) shown in FIG. 1), the ends of thecapillaries 114, 116 being arranged on or under the chambers 110, 112.In this case, the capillaries 114, 116 and the chambers 110, 112 aremade of two separate layers of material.

The height of the capillaries 114, 116 (dimension parallel to the Z axisshown in FIG. 1) is here less than or equal to around half of the heightof the chambers 110, 112. This configuration makes it possible to have aresonance frequency of the cell which is low, for example betweenseveral hundreds of Hz and several kHz. In addition, this configurationmay be obtained when the cell 106 is formed by the stack of two layersof material by producing the capillaries 114, 116 in a part of thethickness of one of these two layers (for example half of the thicknessof the layer) and by producing the chambers 110, 112 in a part of thethickness of each of these two layers (for example half of the thicknessof each of the layers). Nevertheless, it is also possible to have in avariant capillaries 114, 116 of height substantially equal to that ofthe chambers 110, 112. In this case, the two layers of the cell 106 maybe etched in a similar manner with half of the capillaries 114, 116 andthe chambers 110, 112 produced in each of these two layers.

The cell 106 also comprises a first opening 118 emerging in thecapillary 114 and making it possible to bring the gas into the chambers110 and 112 via this capillary 114 and an input channel connected tothis first opening 118. The cavity 106 also comprises a second opening120 emerging in the capillary 116 and making it possible to evacuate thegas outside of the chambers 110 and 112 via this capillary 116 and anoutput channel connected to this second opening 120. In FIG. 1, theopenings 118, 120 are produced substantially at the middle of the length(dimension parallel to the Y axis shown in FIG. 1) of these capillaries114, 116. In a variant, the second opening 120 may be used to bring thegas into the chambers 110 and 112 via the capillary 116, and the firstopening 118 can serve to evacuate the gas outside of the chambers 110and 112 via the capillary 114.

The cell 106 may be produced from different materials such assemiconductor, for example silicon, glass, plastic, ceramic or insteadmetal such as for example aluminum, stainless steel, bronze, etc.Stainless steel is particularly advantageous because this metal is inertvis-à-vis gases capable of being sent into the cell 106. The productionof a cell 106 made of metal is advantageous because the walls of thechambers 110, 112 may in this case reflect light, which enables thisreflected light to again interact with the gas present in the cell 106,and thus to improve the amplitude of the photoacoustic signal.

The device 100 also comprises acoustic detectors 122, 124 such asminiaturized piezoresistive microphones, for example of resonant beamtype, or capacitive microphones of vibrating membrane type, are alsocoupled to the chambers 110, 112 in order to carry out pressuremeasurements in the chambers 110, 112. Each of the chambers 110, 112 maybe coupled to one or more microphones, for example up to eightmicrophones per chamber. The acoustic detectors 122, 124 are arranged inlocations 132, 134 (not visible in FIG. 1) formed in the photoacousticcell 106 and enabling the acoustic coupling of the detectors 122, 124 tothe chambers 110, 112 of the cell 106 as well as the mechanical supportof these detectors 122, 124 on the cell 106.

Finally, the device 100 also comprises electronic circuits forprocessing the signals outputted by the acoustic detectors 122, 124,these circuits not being shown in FIG. 1.

The device 100 described here is modular and comprises a photoacousticcell 106 provided with the first housing 108 and locations 132, 134making it possible to couple in a detachable manner, that is to saynon-definitively, the first photonic circuit 104 and the acousticdetectors 122, 124 to the chambers 110, 112 of the cell 106. Theopenings 118, 120 also make it possible to couple in a detachable mannerthe cell 106 to the separate gas input and output channels of the cell106.

In a variant, only the first photonic circuit 104 may be coupled in adetachable manner to the cell 106.

The operating principle of the device 100 is similar to that describedin the document EP 2 515 096 A1 and is thus not described in detailherein.

The cell 106 is here fastened on a frame, for example made of metal suchas aluminum or brass, which is mechanically and thermally decoupled fromthe light source 102, which makes it possible to manage thermally thecell 106 independently of the light source 102. The light source 102 maythus operate at a very precise temperature which may be different tothat of the gas to study located in the cell 106. A first Peltiercooling system (also called Peltier controller or Peltier module), or awater cooling system may be associated with the light source 102 toadjust the operating temperature of the light source 102, whereas asecond cooling system, for example a second Peltier module or a secondwater cooling circuit, may adjust the temperature of the cell 106 wherethe gas to analyze is present. The device 100 is heterogeneous due tothe fact that the cell 106 and the light source 102 do not have the samethermal conductivity. This configuration makes it possible to have goodthermal management of the device 100.

The steps of producing the photoacoustic cell 106 according to a firstexample of embodiment will now be described with regard to FIGS. 2A to5.

In this first example of embodiment, the cell 106 is formed by theassembly of two metal layers 126, 128 in which are etched, for exampleby chemical etching, the elements of the cell 106. The metal layers 126,128 each have here a thickness equal to around 1.5 mm and are forexample made of stainless steel.

FIG. 2A shows a top view of the first layer 126 in which an upper face130 of the first layer 126 is visible. FIG. 2B shows a perspective viewof the first layer 126 in which the upper face 130 is visible.

The openings 118, 120 are etched through the upper face 130 in a part ofthe thickness of the first layer 126, here equal to around half of thethickness of the first layer 126, that is to say equal to around 0.75mm. The diameters of the openings 118, 120 are equal with respect toeach other and are equal to the width (dimension parallel to the X axis)of the capillaries 114, 116. The locations 132, 134 intended to receivethe acoustic detectors 122, 124 are also etched through the upper face130 in a part of the thickness of the first layer 126, here alsocorresponding to around half of the thickness of the first layer 126.These locations 132, 134 form grooves in which the acoustic detectors122, 124 will be arranged in abutment at the bottom of these grooves.

Fastening holes intended for the tightening of the layers 126, 128together and to ensure the sealing of the cell 106 are also etchedthrough the entire thickness of the first layer 126. Nine fasteningholes, not visible in FIGS. 2A and 2B, are for example produced, five ofthese holes being intended for the tightening of the layers 126, 128against each other and four other holes being intended for the support,above the cell 106, of a gas supply device of the cell 106.

FIG. 3A shows a bottom view of the first layer 126 on which a lower face136 of the first layer 126 is visible. FIG. 3B shows a perspective viewof the first layer 126 in which the lower face 136 is visible.

A first part of the chambers 110, 112 and the capillaries 114, 116 areetched in the form of trenches through the lower face 136 in a part ofthe thickness of the first layer 126, here equal to around half of thethickness of the first layer 126, that is to say equal to around 0.75mm. The fastening holes (not visible in FIGS. 3A and 3B) producedthrough the first layer 126 are thus also present at the level of thelower face 136.

FIG. 4A shows a top view of the second layer 128 in which an upper face138 of the second layer 128, intended to be arranged against the lowerface 136 of the first layer 126, is visible. FIG. 4B shows a perspectiveview of the second layer 128 in which the upper face 138 is visible.

Trenches intended to form a second part of the chambers 110, 112 areetched through the upper face 138 in a part of the thickness of thesecond layer 128, here equal to around half of the thickness of thesecond layer 128, that is to say equal to around 0.75 mm. The firsthousing 108 in which the first photonic circuit 104 is intended to beinserted is also etched through the upper face 138 in a part of thethickness of the second layer 128, here equal to around half of thethickness of the second layer 128, that is to say equal to around 0.75mm. The dimensions of the first housing 108 are suited to the firstphotonic circuit 104 which is intended to be optically coupled to thecell 106. Fastening holes (not visible in FIGS. 4A and 4B) are alsoproduced through the second layer 128. The number, the dimensions andthe positioning of these holes correspond to those formed through thefirst layer 126. A second housing 140 is also etched through the upperface 138 in a part of the thickness of the second layer 128, here equalto around half of the thickness of the second layer 128, that is to sayequal to around 0.75 mm. This second housing 140 here has dimensionssimilar to those of the first housing 108. This second housing 140 isintended to receive a second photonic circuit 146 which will beoptically coupled to an output face 111 of the first chamber 110(opposite to the input face 109 intended to receive the light beam fromthe first photonic circuit 104) and will make it possible to collect theoutput light signal having crossed through the first chamber 110 inorder to be able for example to check the alignment and the power of thelight beam emitted by the source 102. This second housing 140 isnevertheless optional because the device 100 may not comprise thissecond photonic circuit 146.

The two layers 126, 128 are then sealed together to form the cell 106,shown in FIG. 5. The stack, or assembly, obtained thus comprises, on theupper face 130 of the first layer 126, the locations 132, 134 intendedfor the acoustic detectors 122, 124 and the openings 118, 120 for theinput and the output of the gas from the cell 106. The housings 108, 140are accessible from the lateral faces of the cell 106.

The dimensions of the elements of the cell 106 are for example:

-   -   chambers 110, 112: length (dimension along the X axis) equal to        around 20 mm, width (dimension along the Y axis) equal to around        1.5 mm, and height (dimension along the Z axis) equal to around        1.5 mm;    -   capillaries 114, 116: length (dimension along the X axis) equal        to around 20 mm, width (dimension along the Y axis) equal to        around 1.5 mm, and height (dimension along the Z axis) equal to        around 0.75 mm;    -   spacing between the capillaries 114, 116 (dimension parallel to        the X axis) equal to around 10 mm;    -   height (dimension along the Z axis) of the housings 108, 140        equal to around 0.75 mm.

The total volume of the cell 106 is equal to around 135 mm³.

According to a variant of embodiment, the device 100 may comprisechambers 110, 112 not having similar dimensions. In fact, given that thedevice 100 is a miniaturized device, an opposition of phases may appearbetween the pressure signals measured in the two chambers 110 and 112which is imperfect when the dimensions of the chambers 110 and 112 areidentical. The subtraction of these two signals which is carried out toobtain the desired measurement is then not optimal. In order to improvethis opposition of phases, it is possible that the widths and/or thelengths of the chambers 110 and 112 is different to each other. Anoptimization by simulation (for example by resolving the equation of thepressure field in the device 100, with chambers 110, 112 of differentsizes), for example via a calculation by the finite elements method,leads to the optimal ratio of the dimensions of the chambers 110, 112.

This pressure homogeneity in the chambers 110, 112 also makes itpossible to couple a large number of acoustic detectors per chamber andthus have a better signal to noise ratio.

To reduce the pressure difference in the chambers 110, 112, it is alsopossible to modify the spacing of the capillaries 114, 116. It is thusadvantageous that the capillaries 114, 116 are spaced apart by adistance equal to around half of the length of the chambers 110, 112(which corresponds, for the example described previously, to a spacingof 10 mm between the capillaries 114, 116 for the chambers 110, 112 eachof length equal to 20 mm). Consequently, the pressure inhomogeneity inthe chambers 110, 112 reduces, and it is possible to increase the numberof acoustic detectors coupled to the chambers 110, 112, which makes itpossible to improve the signal/noise ratio of the device 100.

The curve 10 visible in FIG. 6 represents the value of the resonancefrequency obtained in the cell 106 as a function of the value of thespacing between the capillaries 114, 116, and the curve 12 representsthe pressure homogeneity (the percentage difference between the minimumvalue and the maximum value of pressure in the chambers 110, 112) as afunction of the value of the spacing between the capillaries 114, 116.These data are obtained for chambers 110, 112 of length equal to 20 mm,of width equal to 1.5 mm and height equal to 1.5 mm, and for capillaries114, 116 of length equal to 20 mm, of width equal to 0.8 mm and heightequal to around 1.5 mm, and in the case where the capillaries 114, 116emerge in the chambers 110, 112 at levels corresponding to around ¼ and¾ of their length. The curve 12 clearly shows that the best homogeneityis obtained when the capillaries 114, 116 are spaced apart by a distanceequal to half of the length of the chambers 110, 112, i.e. 10 mm in thepresent case.

The curve 14 visible in FIG. 7 represents the value of the amplitude ofthe acoustic signal obtained in the chambers 110, 112 of the cell 106,when the spacing between the capillaries 114, 116 is equal to half ofthe length of the chambers 110, 112, and by varying the width (dimensionalong the X axis for the example shown in FIG. 1) of the capillaries114, 116 with the aim of finding the optimum signal that can beoutputted by the acoustic detectors 122, 124. This curve shows that themaximum value of the signal obtained in the cell 106 is obtained whenthe width of the capillaries 114, 116 is equal to around 1.5 mm.

In the example of FIG. 1 described previously, the openings 118, 120emerge substantially at the level of the middle of the length of thecapillaries 114, 116. In a variant, these openings 118, 120 may beformed at another level than the middle of the length of the capillaries114, 116, and this may be done without perturbing the symmetry of theflow of the gas in the device 100 if the gas input and output aresufficiently narrow.

To increase the intensity of the signal measured by the acousticdetectors 122, 124 of the device 100, it is possible to produce thecapillaries 114, 116 such that they are arranged at the ends of thechambers 110, 112. Such a configuration makes it possible to increase byaround 5% the amplitude of the signal measured by the acousticdetectors. However, this increase in the amplitude of the signal occursto the detriment of the pressure homogeneity which, for its part,reduces, while remaining good.

The different embodiment options described in the document EP 2 515 096A1, such as for example the use of a Peltier effect, an amplifierintegrated in the device, or the different examples of materialsdescribed, may apply to the modular photoacoustic detection devicedescribed here.

FIGS. 8A to 8C schematically show the device 100 according to differentconfigurations, having different possible couplings between the lightsource 102 and the first photonic circuit 104.

In these three figures, the device 100 comprises a first Peltier coolingsystem 142 associated with the light source 102 making it possible tothermally manage the light source 102 independently of the otherelements of the device 100. The device 100 also comprises, in theconfigurations shown in FIGS. 8A and 8C, a second Peltier cooling system144 associated with a frame (not visible in FIGS. 8A and 8C) on which isarranged the cell 106 and making it possible to thermally manage thecell 106 independently of the other elements of the device 100, notablyindependently of the light source 102 and making it possible to make thecell 106 work at a temperature different to that of the light source102.

Moreover, in these three figures, the device 100 comprises a secondphotonic circuit 146, for example made of silicon, optically coupled tothe output face 111 of the first chamber 110 (opposite to the input face109 intended to receive the light beam from the photonic circuit 104)and making it possible to collect the output light signal having crossedthrough the first chamber 110 in order to be able for example to checkthe alignment and the power of the light beam emitted by the source 102.A part of the second photonic circuit 146 is inserted in the secondhousing 140 formed in the cell 106 such that the output face 111 of thefirst chamber 110 is directly coupled to this second photonic circuit146. Finally, the device 100 comprises an optical detector 148 intendedto receive the signal from the second photonic circuit 146.

In the first example shown in FIG. 8A, the light source 102 correspondsto a laser source only emitting a single wavelength, for example in theMIR, of which the beam is sent into a collimation system 150 includingat least one or even two lenses and making it possible to have at theoutput a light beam collimated over several centimeters. In fact, a QCLlaser emits a laser beam divergent at its output. The collimation system150 makes it possible to collimate this beam and to reduce its size.

On arriving in the system 150, the beam is collimated with a firstcorrectly positioned lens of focal length f. If the laser source 102 isa point source, it suffices to place the output of the laser source 102at the focal length of this first lens, which makes it possible to havea beam parallel at the output of the first lens. If the source 102 isnot a point source, it is necessary to take into account in this caseits shape. Let y1 be the radius of the laser beam and θ1 the angle ofdivergence of the beam at the output of the source 102. The collimationof the light of this source 102 by a first lens of focal length fproduces a beam of radius y2=θ1*f and an angle of divergence θ2=y1/f.Whatever the lens, the radius and the divergence of the beam depend oneach other. For example, to improve the collimation by a factor of two(by reducing the angle by half), it is necessary to multiply thediameter of the beam by two.

In order to reduce the size of the collimated beam, a group of twolenses is used in the system 150. If these two lenses are convergent ofrespective focal lengths f1 and f2, and if it is wished to reduce thelaser beam, the lenses are chosen such that f2<f1. The transversalmagnification obtained is given by the formula G=f2/f1.

It is also possible to only position a single lens, with in this casethe laser placed at the focal length of the lens in order to have a beamat the output of the lens which is collimated.

It is also possible to carry out the collimation and the reduction ofthe beam using two lenses as may be done with a telescope type mounting,that is to say an afocal system formed of two lenses where the secondaryfocal point of the first lens coincides with the primary focal point ofthe second lens, making it possible to create a beam reducer.

To ensure a good coupling between the first photonic circuit 104 and theassembly including the source 102 and the system 150, it is possible toplace this assembly on a support being able to control the translationsand rotations of the assembly along 3, 5 or 6 axes, thus making itpossible to obtain a good positioning of this assembly with respect tothe first photonic circuit 104 (which is placed in the first housing 108and which, as a result, is correctly positioned linearly facing thefirst chamber 110 of the cell 106).

The collimation system 150 is interposed between the light source 102and the input face 105 of the first photonic circuit 104 whichcorresponds, in this first example, to a waveguide suited to thewavelength of the beam emitted by the source 102 and which makes itpossible to guide the beam in the first chamber 110. At the output ofthe first chamber 110, the light beam is still collimated and comes outof the first chamber 110 via the second photonic circuit 146 forming awaveguide or a window that is transparent vis-à-vis the wavelength ofthe beam.

In this first example, the light source 102 is not in direct contact, orbonded, to the first photonic circuit 104 which itself is mounted in adetachable manner in the first housing 108 of the cell 106. The firstcooling system 142 is arranged under the light source 102.

In the second example shown in FIG. 8B, the light source 102 correspondsto a bar of several laser sources or a single laser source. The source102 is here in direct contact with the first photonic circuit 104 whichcorresponds to a multiplexer/demultiplexer circuit of AWG (arrayedwaveguide grating) type, or arrayed waveguide gratingmultiplexer/demultiplexer, for example made of Ge or SiGe. The opticalcoupling between the source 102 and the first photonic circuit 104 isfor example obtained via a direct coupling by the edge of the firstphotonic circuit 104. The source 102 is here integral with the firstphotonic circuit 104. The length of the first photonic circuit 104 isgreater than that of the first housing 108 so that only a part of thefirst photonic circuit 104 is inserted in the first housing 108 and thatthe light source 102 is located outside of the cell 106 (this is alsothe case in the other examples described).

An example of positioning of the source 102 on the first photoniccircuit 104 is described below. When the source 102 corresponds to a barof lasers, the outputs of the bar are positioned facing the inputs ofthe first photonic circuit 104 using a binocular magnifier. The bar oflasers is placed on a support controlling the translations and rotationsof the bar along 3, 5 or 6 axes in order to carry out a preliminarypositioning of the bar vis-à-vis the first photonic circuit 104. Acamera visualizing the MIR radiations at the output of the firstphotonic circuit 104 is then used to adjust in a more meticulous mannerthe positioning of the bar of lasers by playing on the axes of thesupport. The optimal adjustment is obtained when the camera sees aconsequent illumination at the output of the first photonic circuit 104.

This second configuration makes it possible to favor the temperaturecontrol of the light source 102, notably when the source 102 correspondsto a bar of several lasers. In fact, due to the fact that the wavelengthemitted by each laser varies with the operating temperature of theselasers, it is thus necessary to control the temperature of the bar oflasers. Given that the source 102 is in contact with the first photoniccircuit 104 and that this is also in direct contact with thephotoacoustic cell 106, it is not possible to independently temperaturecontrol the source 102 vis-à-vis the cell 106. If the cell 106 works ata different temperature to that of the source 102, the temperaturecontrol of the cell 106 is going to have an influence on the temperatureof the source 102. A temperature management of the source 102 is thusfavored by associating a cooling system only with the source 102 toensure the correct operation of the latter. In the third example shownin FIG. 8C, the optical coupling between the light source 102, here oflaser type, and the input face 105 of the first photonic circuit 104 isproduced by an optic fiber 152. The use of such an optic fiber 152enables easy control of the light beam, notably concerning itsdirection. This third example is for example advantageous when the lightsource 102 is distant and/or not aligned with the photoacoustic cell106.

When the source 102 corresponds to a single laser, the laser output maybe connected to the optic fiber 152. This fiber 152 is placed facing thelaser using a support, the aim of which is to ensure optimal couplingbetween the laser and the fiber 152. This support may correspond to asmall plate which is then fastened to the laser when the adjustment isoptimal. Once this first coupling has been carried out, a similarcoupling is carried out between the other side of the fiber 152 and theinput of the first AWG type photonic circuit 104 corresponding to thewavelength of the beam emitted by the laser 102. A support may also beused to align the first photonic circuit 104 with the fiber 152. Oncethese adjustments have been made, the first photonic circuit 104 isarranged in the first housing 108 facing the first chamber 110. Thelight thus enters into the cell 106 with a certain divergence. This doesnot prevent the interaction between the laser and the molecules of gasto detect.

It is possible to use tapers, or progressive connections, at the inputof the first photonic circuit 104 in order to facilitate the couplingbetween the fiber 152 and the laser. In the case of the guided optic,such a taper makes it possible to connect two guides of same thicknessbut of different section for example by a prism with trapezoidal base.

The first photonic circuit 104 may comprise a pointed-shaped end (at thelevel of the input face 105), that is to say of width less than that ofthe remainder of the photonic circuit 104. Such a pointed-shaped endmakes it possible to make less divergent the light beam obtained notablyat the output of the optic fiber 152, and is advantageous when it is notnecessary to collimate the light beam at the input of the first photoniccircuit 104.

In the first example of embodiment of the photoacoustic cell 106described previously with regard to FIGS. 2A to 5, the cell 106 isproduced from two metal layers 126, 128 in which are etched the elementsof the cell 106. The locations 132, 134, the housings 108, 140, thechambers 110, 112 and the capillaries 114, 116 are etched in a part ofthe thickness of the metal layers 126, 128.

In a variant, it is possible to implement steps of etching through theentire thickness of the layers of material used to form the cell 106.This implies making use of more than two layers of material to producethe cell 106. Such a second example of embodiment of the cell 106 isdescribed below with regard to FIGS. 9 to 12.

In this second example of embodiment, the photoacoustic cell 106 isproduced by an assembly of four layers of material, here four metallayers referenced 154, 156, 158 and 160, in which the different elementsof the cell 106 are formed by laser etching. All the etchings carriedout in each of these layers 154 to 160 cross through the entirethickness of this layer. In a variant of laser etching, it is possiblethat a chemical etching is implemented through the entire thickness ofthese layers.

The first layer 154 is shown in FIG. 9. This first layer 154 is intendedto form the upper cover of the cell 106 and ensure the closing of theupper faces of the capillaries 114, 116. Nine fastening holes 162 areetched through the entire thickness of the first layer 154, thisthickness being for example equal to around 0.5 mm.

The second layer 156 is shown in FIG. 10. This second layer 156 iscrossed through by two slender openings forming the capillaries 114,116. It is also crossed through by the fastening holes 162. When thefirst layer 154 is arranged on the second layer 156, the capillaries114, 116 are thus closed, at the level of the face of the second layer156 which is in contact with the first layer 154, by the first layer154. The thickness of the second layer 156 is for example equal toaround 0.5 mm.

The third layer 158 is shown in FIG. 11. This third layer 158 is crossedthrough by two slender openings forming the chambers 110, 112. It isalso crossed through by another opening intended to form the firsthousing 108 into which the first photonic circuit 104 will be inserted(in this example, the cell 106 does not comprise the second housing140). Two other holes are formed through the third layer 158 to form theopenings 118, 120 serving for bringing in and evacuating the gas in thecell 106. Finally, the fastening holes 162 are also produced throughthis third layer 158. The thickness of this third layer 158 is of theorder of the thickness of the first photonic circuit 104, advantageouslyaround 0.72 mm, that is to say the typical thickness of a siliconsubstrate. The third layer 158 is arranged against the face of thesecond layer 156 opposite to that arranged against the first layer 154,that is to say such that the second layer 156 is arranged between thefirst layer 154 and the third layer 158. By thus positioning the thirdlayer 158 against the second layer 156, the gas input and outputopenings 118, 120 are positioned just above the capillaries 114, 116.This third layer 158 also makes it possible to close the capillaries114, 116 at the level of the face of the second layer 156 which is incontact with the third layer 158. In addition, the chambers 110, 112 andthe first housing 108 are closed, at the level of the face of the thirdlayer 158 which is in contact with the second layer 156, by the secondlayer 156. Finally, when the third layer 158 is thus arranged againstthe second layer 156, each of the capillaries 114, 116 communicates withthe chambers 110, 112.

The fourth layer 160 is shown in FIG. 12. This layer 160 is crossedthrough by the openings 118, 120, by the fastening holes 162, as well asby two other openings intended to form the locations 132, 134 for theacoustic detectors 122, 124. This fourth layer 160 closes the chambers110, 112 and the first housing 108 at the level of the face of the thirdlayer 158 which is in contact with this fourth layer 160. The thicknessof the fourth layer 160 is for example equal to around 0.5 mm.

For the production of the photoacoustic cell 106, the four layers 154,156, 158 and 160 are assembled against each other as described above,then fastened for example by four screws arranged in the fastening holes162 situated at the corners of the stack of layers. A central screw maybe arranged in the fastening hole 162 located at the center of the cell106, making it possible to make the cell 106 integral with a frame. Anadditional mechanical part comprising gas input and output channelsenabling the input and the output of the gas to analyze in the cell 106,is for example arranged on the cell 106. O-rings are arranged betweenthe fourth layer 160 of the cell 106 and this additional part. Theassembly is then tightened by four other screws to the frame via thefour remaining fastening holes 162, which ensures all the more amaintaining of the cell 106 to the frame.

In this second example of embodiment of the photoacoustic cell 106, thedimensions of the chambers 110, 112 are for example equal to around 20mm (length)*0.75 mm (width)*0.72 mm (height), and the dimensions of thecapillaries 114, 116 are for example equal to around 20 mm (length)*0.5mm (width)*0.5 mm (height). The openings 118, 120 each have for examplea diameter equal to around 0.3 mm. Finally, the dimensions of thehousing 108 are for example equal to around 6 mm (width)*7.5 mm(length)*0.72 mm (height).

According to a third example of embodiment of the photoacoustic cell106, it may be produced by 3D printing using metal powders sintered froma CO₂ laser, also called DMLS for Direct Metal Laser Sintering. FIG. 13schematically shows a photoacoustic cell 106 produced by such a method.This method makes it possible to produce the cell 106 with optimalprecision thanks to the production of layers of thickness equal toaround 0.02 mm and with a very good resolution of details as well asexcellent mechanical properties. Such a technique may be implementedwith different metals such as stainless steel, an alloy of chromium andcobalt, aluminum, titanium or super-alloys such as those sold under thetradename Incolnel®. The photoacoustic cell 106 obtained with thismethod corresponds to a monolithic part.

The invention claimed is:
 1. A modular photoacoustic detection devicecomprising: a photoacoustic cell including at least two chambersconnected by at least two capillaries and forming a Helmholtz typedifferential acoustic resonator; acoustic detectors coupled to thechambers; a light source configured to emit a light beam having at leastone wavelength for exciting a gas to be detected and which can bemodulated to a resonance frequency of the photoacoustic cell; a firstphotonic circuit configured to optically couple the light source to aninput face of a first of the chambers, wherein the first photoniccircuit is arranged in a detachable manner in a first housing formed inthe photoacoustic cell and emerging on the input face of the firstchamber, and the photoacoustic detection device further comprising atleast one first cooling system configured to thermally adjust the lightsource and, when the light source is not arranged against the firstphotonic circuit, a second cooling system configured to thermally adjustthe photoacoustic cell independently of the light source.
 2. The deviceaccording to claim 1, wherein the acoustic detectors are coupled in adetachable manner to the photoacoustic cell.
 3. The device according toclaim 1, wherein the photoacoustic cell comprises at least one stack ofa first layer and of a second layer of material in which are formed thechambers, the capillaries, the first housing, at least two openings eachemerging in one of the capillaries and at least two locations eachcommunicating with one of the chambers and in which the acousticdetectors are arranged.
 4. The device according to claim 3, wherein: thelocations are formed in a part of a thickness of the first layer andcross through an upper face of the first layer; the openings crossthrough the entire thickness of the first layer; a first part of each ofthe chambers is formed in a part of the thickness of the first layer andcrosses through a lower face of the first layer opposite to the upperface of the first layer; the capillaries are formed in a part of thethickness of the first layer and cross through the lower face of thefirst layer; a second part of each of the chambers is formed in a partof a thickness of the second layer and crosses through an upper face ofthe second layer which is arranged against the lower face of the firstlayer, the first and second parts of each of the chambers being arrangedfacing each other; the first housing is formed in a part of thethickness of the second layer and crosses through the upper face of thesecond layer.
 5. The device according to claim 1, wherein thephotoacoustic cell comprises at least one stack of a first layer, secondlayer, third layer, and fourth layer of material in which are formed thechambers, the capillaries, the first housing, at least two openings eachemerging in one of the capillaries and at least two locations eachcommunicating with one of the chambers and in which the acousticdetectors are arranged.
 6. The device according to claim 5, wherein: thecapillaries cross through an entire thickness of the second layer, thefirst and third layers between which the second layer is located formingupper and lower walls of the two capillaries; the chambers and the firsthousing cross through the entire thickness of the third layer, thesecond and fourth layers between which is located the third layerforming upper and lower walls of the chambers and of the first housing;the locations cross through the entire thickness of the fourth layer;the openings cross through the entire thickness of the third and fourthlayers.
 7. The device according to claim 1, wherein the photoacousticcell is formed of a monolithic part of sintered powders.
 8. The deviceaccording to claim 1, wherein the light source is optically coupled toan input face of the first photonic circuit by at least one collimationsystem comprising at least one lens, and wherein the first photoniccircuit forms at least one waveguide.
 9. The device according to claim1, wherein the light source is configured to emit a light beam havingseveral wavelengths and is arranged against the first photonic circuitwhich forms an arrayed waveguide grating multiplexer-demultiplexercircuit.
 10. The device according to claim 1, wherein the light sourceis optically coupled to an input face of the first photonic circuit byat least one optic fiber, and wherein the first photonic circuit formsat least one waveguide or an arrayed waveguide gratingmultiplexer-demultiplexer circuit.
 11. The device according to claim 1,wherein the photoacoustic cell further comprises at least one secondhousing emerging on an output face of the first chamber, and furthercomprising at least one second photonic circuit optically coupling theoutput face of the first chamber to an optical detector and arranged ina detachable manner in the second housing.
 12. The device according toclaim 1, wherein the photoacoustic cell comprises one or more metals.13. The device according to claim 1, wherein a distance between the atleast two capillaries is equal to half of a length of at least one ofthe chambers.
 14. A gas detection device, comprising the deviceaccording to claim 1 and gas input and output channels communicatingwith the chambers of the photoacoustic detection device, and whereinsaid at least one wavelength of the light beam emitted by the lightsource corresponds to at least one absorption wavelength of at least onegas to be detected.
 15. A method for producing a modular photoacousticdetection device, comprising: producing at least one photoacoustic cellincluding at least two chambers connected by at least two capillariesand forming a Helmholtz type differential acoustic resonator; couplingacoustic detectors to the chambers; producing at least one light sourceconfigured to emit a light beam having at least one wavelength formaking the photoacoustic cell resonate; producing at least one firstphotonic circuit arranged in a detachable manner in a first housingformed in the photoacoustic cell and emerging on an input face of afirst of the chambers, and optically coupling the at least one lightsource to the input face of the first chamber, and producing at leastone first cooling system configured to thermally adjust the at least onelight source and, when the at least one light source is not arrangedagainst the first photonic circuit, a second cooling system configuredto thermally adjust the photoacoustic cell independently of the lightsource.
 16. The method according to claim 15, wherein: the production ofthe at least one photoacoustic cell comprises production of at least onestack of a first layer and of a second layer of material in which areformed, by chemical etching implemented in a part of a thickness of eachof the first layer and the second layer, the chambers, the capillaries,the first housing, at least two openings each emerging in one of thecapillaries and at least two locations each communicating with one ofthe chambers and in which the acoustic detectors are arranged, or theproduction of the at least one photoacoustic cell comprises productionof at least one stack of a first layer, a second layer, a third layer,and a fourth layer of material in which are formed, by chemical etchingor laser implemented in an entire thickness of each of the second laythe third layer, and the fourth layer, the chambers, the capillaries,the first housing, at least two openings each emerging in one of thecapillaries and at least two locations each communicating with one ofthe chambers and in which the acoustic detectors are arranged, or thephotoacoustic cell is formed of a monolithic part of sintered metalpowders obtained by 3D printing.